SMC ITV1011-21N1S/L/N ITV1031-21N1S/L/N ITV1051-21N1S/L/N Electro Pneumatic Regulator
Basic Properties
Trading Properties
| Item Code: | ITV1011-21N1S ITV1031-21N1S ITV1051-21N1S ITV1011-21N1L ITV1031-21N1L ITV1051-21N1L ITV1011-21N1N ITV1031-21N1N ITV1051-21N1N | Body Material: | Aluminum |
|---|---|---|---|
| Seals Material: | NBR | Operating Pressure: | 0.1~1.0MPa |
| Working Temperature Range: | 0~50°C (No Condensation) | Port Size: | 1/8" |
| Function: | Proportional Pressure Control Via Electrical Signals | Operating Voltage: | 12 To 15 VDC |
| Highlight | electro pneumatic regulator solenoid valve,ITV series pneumatic pressure regulator,industrial pneumatic solenoid valve |
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SMC ITV1011-21N1S/L/N ITV1031-21N1S/L/N ITV1051-21N1S/L/N Electro Pneumatic Regulator
These regulators find specialized applications in semiconductor manufacturing, particularly in CMP (Chemical Mechanical Planarization) equipment where they precisely control polishing head pressure for wafers, LCD glasses, and color filters. They're also essential in thrust control systems, press-fit operations, and precision assembly lines where consistent force application is critical, with the alarm output feature (available in X420 models) providing immediate notification if set pressure isn't reached or maintained for over 5 seconds.
| Item Code | Pressure range | Power supply voltage |
| ITV1011-21N1S | 0.1 MPa | 12 to 15 VDC |
| ITV1031-21N1S | 0.5 MPa | 12 to 15 VDC |
| ITV1051-21N1S | 0.9 MPa | 12 to 15 VDC |
| ITV1011-21N1L | 0.1 MPa | 12 to 15 VDC |
| ITV1031-21N1L | 0.5 MPa | 12 to 15 VDC |
| ITV1051-21N1L | 0.9 MPa | 12 to 15 VDC |
| ITV1011-21N1N | 0.1 MPa | 12 to 15 VDC |
| ITV1031-21N1N | 0.5 MPa | 12 to 15 VDC |
| ITV1051-21N1N | 0.9 MPa | 12 to 15 VDC |
| Model | ITV101□ | ITV103□ | ITV105□ | |
| ITV201□ | ITV203□ | ITV205□ | ||
| ITV301□ | ITV303□ | ITV305□ | ||
| Min. supply pressure | Set pressure + 0.1 MPa | |||
| Max. supply pressure | 0.2 MPa | 1.0 MPa | ||
| Set pressure range | 0.005 to 0.1 MPa | 0.005 to 0.5 MPa | 0.005 to 0.9 MPa | |
| Power supply | Voltage | 24 VDC ±10%, 12 to 15 VDC | ||
| Current consumption | Power supply voltage 24 VDC type: 0.12 A or less Power supply voltage 12 to 15 VDC type: 0.18 A or less | |||
| Input signal | Current type | 4 to 20 mADC, 0 to 20 mADC (Sink type) | ||
| Voltage type | 0 to 5 VDC, 0 to 10 VDC | |||
| Preset input | 4 points (Negative common), 16 points (No common polarity) | |||
| Digital input | 10 bits (Parallel) | |||
| Input impedance | Current type | 250 Ω or less | ||
| Voltage type | Approx. 6.5 kΩ | |||
| Preset input | Power supply voltage 24 VDC type: Approx. 4.7 kΩ Power supply voltage 12 VDC type: Approx. 2.0 kΩ | |||
| Digital input | Approx. 4.7 kΩ | |||
| Output signal (Monitor output) | Analog output | 1 to 5 VDC (Output impedance: Approx. 1 kΩ) 4 to 20 mADC (Sink type) (Output impedance: 250 Ω or less) Output accuracy ±6% F.S. or less | ||
| Switch output | NPN open collector output: Max. 30 V, 80 mA PNP open collector output: Max. 80 mA |
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| Linearity | ±1% F.S. or less | |||
| Hysteresis | 0.5% F.S. or less | |||
| Repeatability | ±0.5% F.S. or less | |||
| Sensitivity | 0.2% F.S. or less | |||
| Temperature characteristics | ±0.12% F.S./°C or less | |||
| Output pressure display | Accuracy | ±2% F.S. ±1 digit or less | ||
| Min. unit | MPa: 0.001, kgf/cm²: 0.01, bar: 0.01, psi: 0.1, kPa: 1 | |||
| Ambient and fluid temperatures | 0 to 50°C (No condensation) | |||
| Enclosure | IP65 | |||
| Weight | ITV10□□ | Approx. 250 g (Without options) | ||
| ITV20□□ | Approx. 350 g (Without options) | |||
| ITV30□□ | Approx. 645 g (Without options) | |||






Contact Person: Mr. Jaren
Tel: 86-152-5785-8856
Fax: 86-152-57858856